AdvanTools Semiconductor (China) Co., Ltd

Mask & Chip Manufacturing
Inspection Solution
Print Circuit Boards

Mask & Chip Manufacturing

　　AdvanTools’ ATD series maskless photolithography equipment are based on 2nd generation maskless (ML2) technology.
　　ATD series help customers to eliminate the cost and the complex process of mask fabrication by making use of the spatial light modulator to achieve multi-beam writing simultaneously. It leads to the advantage with high performance, high precision, more flexible applications. With AdvanTools’ proprietary high-power LED/LD or Excimer laser illumination, ATD series have the resolution down to 0.35um with a good overlay performance of 80nm. ATD series can be widely used in 90nm-node photomask fabrication, MEMS, LED and Bio-Chip applications.

Inspection Solution

　　AdvanTools' ATI series metrology equipment combine three functionalities in one system: CDmeasurement, Overlay measurement and customer defined defect inspection.
　　ATI series have the advantage with high throughput, high precision, more flexible applications by making use of advanced imaging and processing technologies.ATI series can be widely used in semiconductor, MEMS, LED and so on.

Print Circuit Boards

AdvanTools’ LDI（ Laser Direct Imaging） systems are based on AdvanTools’ state of the

art 2nd generation maskless (ML2) technology. AdvanTools’ LDI systems use the spatial light
modulator technology in order to achieve a simultaneous multi-beam scanning, avoiding the
complex and costly process of film fabrication.
Removing the film making from the PCB fabrication process, AdvanTools’ LDI systems have
the advantages of high throughput and flexibility. Possible fields of application are:
1） High resolution IC SUBSTRATE, FPC, with minimum resolution of 10um;
2)） High accuracy ANY-LAYER HDI, with alignment accuracy ≤10um;
3） PCB sample house producing small quantities but a large variety of products with high
utilization rate.


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